Standard: ISO - 19606

FINE CERAMICS (ADVANCED CERAMICS, ADVANCED TECHNICAL CERAMICS) - TEST METHOD FOR SURFACE ROUGHNESS OF FINE CERAMIC FILMS BY ATOMIC FORCE MICROSCOPY

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Scope:

This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.

Organization: International Organization for Standardization
Document Number: 19606
Publish Date: 2017-02-01
Page Count: 32
Change Type: NEW ADDITION
Available Languages: EN
DOD Adopted: NO
ANSI Approved: NO
Most Recent Revision: YES
Current Version: YES
Status: Active
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