ASTM F1189
STANDARD TEST METHOD FOR USING COMPUTER-ASSISTED INFRARED SPECTROPHOTOMETRY TO MEASURE THE INTERSTITIAL OXYGEN CONTENT OF SILICON SLICES POLISHED ON BOTH SIDES
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| Organization: | ASTM |
| Publication Date: | 31 October 1988 |
| Status: | inactive |
| Page Count: | 4 |
Document History
ASTM F1189
October 31, 1988
STANDARD TEST METHOD FOR USING COMPUTER-ASSISTED INFRARED SPECTROPHOTOMETRY TO MEASURE THE INTERSTITIAL OXYGEN CONTENT OF SILICON SLICES POLISHED ON BOTH SIDES
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