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This document gives the specification for ISO 4, ISO 5 and ISO 6 cleanroom gloves. It is applicable to cleanroom gloves made of natural rubber latex (NRL).
This test method covers the determination of solvent extractable nonvolatile residue (NVR) from wipers used in assembly, cleaning, or testing of spacecraft, but not from those used for analytical surface sampling of hardware. The NVR of interest is that which can be extracted from cleanroom...
1.1 This test method covers the determination of solvent extractable nonvolatile residue (NVR) from wipers used in assembly, cleaning, or testing of spacecraft, but not from those used for analytical surface sampling of hardware. 1.2 The NVR of interest is that which can be extracted from...
This Standard specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones, and separative devices as defined in JIS B 9917-7. Only particle populations having cumulative distributions based on threshold (lower limit) particle...
4.1 This section provides a description of the environmental conditions listed in Section 1 and describes the sub-conditions within each condition. Examples provided for many of the conditions and sub-conditions are provided as guidance only. Each of the conditions described should be evaluated and...
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this...
This Recommended Practice (RP) makes recommendations regarding factors to consider in the design of cleanroom facilities. This discussion is limited to those environmental conditions that typically confront cleanroom designers and users.
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less - "nanoscale" - are considered. The monitoring given in this...
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both. Purpose. This...
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical...
This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this document is based on...
This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the...
This Recommended Practice (RP) addresses design, usage, maintenance, and testing considerations related to vacuum cleaning systems designed for use in cleanrooms and other controlled environments. The purpose of the RP is to provide a basis for potential users to properly select and specify...
