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ASHRAE - OR-10-010 - CLEAN ROOM EXHAUST ENERGY RECOVERY OPTIMIZATION DESIGN Organization: ASHRAE
Date: 2010-01-01
Description: Therefore, the application of a heat pipe as a heat exchanger in the heat recovery system is not very popular. In semiconductor cleanrooms, therefore, potential energy recovery from the EA is enormous.
ASHRAE - LO-09-026 - HUMIDIFICATION OF LARGE-SCALE CLEANROOMS BY ADIABATIC HUMIDIFICATION METHOD IN SUBTROPICAL AREAS: AN INDUSTRIAL CASE STUDY Organization: ASHRAE
Date: 2009-01-01
Description: Additionally, the temperature in the cleanroom can be controlled by dry coil, but this does not regulate humidity, so the MAU output humidity control becomes very important, as it is the only mechanism to control the humidity in the clean room. Some cleanrooms have local steam generators to accomplish a double adjustment of humidity, but this only applies in certain portions of a cleanroom.
ASTM F1535 - STANDARD TEST METHOD FOR CARRIER RECOMBINATION LIFETIME IN SILICON WAFERS BY NONCONTACT MEASUREMENT OF PHOTOCONDUCTIVITY DECAY BY MICROWAVE REFLECTANCE Organization: ASTM
Date: 2000-06-10
Description: The generation lifetime, which is another transient characteristic of semiconductor materials, is typically orders of magnitude larger than the recombination lifetime.

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