Vacuum Gauge Standards

This SAE Aerospace Recommended Practice (ARP) addresses the general procedure for the best practices for minimizing uncertainty when calibrating thermal conductivity and cold cathode vacuum gauges, which includes the vacuum sensor(s) and accompanying electronics necessary for a...

Specifies requirements for indicating pressure gauges, vacuum gauges and compound gauges of the bourdon tube type (with C, helical or spiral tube forms) from 50 mm to 30 mm nominal size with ranges up to 1000 bar (100 MPa). See also BS 5235.

This International Standard specifies the physical, technical and metrological conditions to be fulfilled when calibrations of vacuum gauges are performed by direct comparison with a reference gauge. From the conditions described, the design of an apparatus that can perform...

This International Standard defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges....

This part of ISO 3529 gives definitions of total and partial pressure vacuum gauges. lt is a continuation of ISO 3529-1, which defines general terms used in vacuum technology, and of ISO 3529-2, which gives definitions of vacuum pumps and related terms. The terms for...

This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa....

This International Standard gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567. This International Standard describes...

This Technical Specification gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge in accordance with ISO/TS 3567. It describes methods for uniform reporting of...