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BSI - BS PD ISO/TR 16268

Surface chemical analysis - Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

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Organization: BSI
Publication Date: 30 November 2009
Status: active
Page Count: 30
ICS Code (Chemical analysis): 71.040.40
ICS Code (Chemical reagents): 71.040.30

Document History

BS PD ISO/TR 16268
November 30, 2009
Surface chemical analysis - Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
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References

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