BSI - BS PD ISO/TR 16268
Surface chemical analysis - Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
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| Organization: | BSI |
| Publication Date: | 30 November 2009 |
| Status: | active |
| Page Count: | 30 |
| ICS Code (Chemical analysis): | 71.040.40 |
| ICS Code (Chemical reagents): | 71.040.30 |
Document History
BS PD ISO/TR 16268
November 30, 2009
Surface chemical analysis - Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
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