BSI - BS ISO 14644-12
Cleanrooms and associated controlled environments Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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| Organization: | BSI |
| Publication Date: | 31 August 2018 |
| Status: | active |
| Page Count: | 20 |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
Document History
BS ISO 14644-12
August 31, 2018
Cleanrooms and associated controlled environments Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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