IEC 62047-34
Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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| Organization: | IEC |
| Publication Date: | 1 April 2019 |
| Status: | active |
| Page Count: | 20 |
| ICS Code (Piezoelectric devices): | 31.140 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
Document History
IEC 62047-34
April 1, 2019
Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
This part of IEC 62047 describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to...