BSI - BS IEC 62047-34
Semiconductor devices – Micro-electromechanical devices Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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| Organization: | BSI |
| Publication Date: | 30 April 2019 |
| Status: | active |
| Page Count: | 20 |
| ICS Code (Piezoelectric devices): | 31.140 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS IEC 62047-34
April 30, 2019
Semiconductor devices – Micro-electromechanical devices Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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