IEC 60050-523
AMENDMENT 1 International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical systems (MEMS)
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Organization: | IEC |
Publication Date: | 1 October 2019 |
Status: | active |
Page Count: | 8 |
ICS Code (Electrical engineering (Vocabularies)): | 01.040.29 |
ICS Code (Other semiconductor devices): | 31.080.99 |
Document History

IEC 60050-523
October 1, 2019
AMENDMENT 1 International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical systems (MEMS)
A description is not available for this item.

December 1, 2018
International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical devices
This part of IEC 60050 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in...