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VDI/VDE 2655 BLATT 1.3

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

active, Most Current
Organization: VDI
Publication Date: 1 February 2020
Status: active
Page Count: 50
ICS Code (Optics and optical measurements in general): 17.180.01

Document History

VDI/VDE 2655 BLATT 1.3
February 1, 2020
Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement
A description is not available for this item.
October 1, 2010
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement
The present guideline applies to confocal microscopes for measuring the topography of technical surfaces. The procedures described for the calibration can be compared with the methods which have...
March 1, 2008
Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
The present guideline VDI/VDE 2655 Part 1.1 applies to interference microscopes used for measuring the topography of industrial surfaces. The calibration procedures described are comparable to the...

References

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