ISO DIS 23216
Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
|Publication Date:||20 May 2020|
|ICS Code (Other treatments and coatings):||25.220.99|
This International Standard specifies spectroscopic ellipsometry (SE) for determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
Amorphous carbon films may be deposited by ionized evaporation, sputtering, arc deposition, plasmaassisted chemical vapour deposition, hot filament techniques and others. Amorphous carbon films have an amorphous structure, containing both sp2 and sp3 bonded carbon, and contain in some cases also hydrogen. There is graphite-like carbon as well as polymer-like, glass-like and diamond-like carbon films. Carbon films modified with metals, silicon and amorphous carbon films that have a gradient of composition/property
As amorphous carbon films show a huge diversity of structure and properties, it is indispensable to select the appropriate type of amorphous carbon film to exploit their excellent properties in practical use. Therefore, carbon films are characterized by spectroscopic ellipsometry under reasonable conditions. This enables classification of amorphous carbon films on silicon wafers within the n-k plane acting as process fingerprint.