BSI - BS ISO 16413
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
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| Organization: | BSI |
| Publication Date: | 31 August 2020 |
| Status: | active |
| Page Count: | 42 |
| ICS Code (Chemical analysis): | 71.040.40 |
| ICS Code (IT applications in science): | 35.240.70 |
Document History
BS ISO 16413
August 31, 2020
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
A description is not available for this item.
March 31, 2013
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
A description is not available for this item.