ISO - 18115-3
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
active, Most Current
Organization: | ISO |
Publication Date: | 1 June 2022 |
Status: | active |
Page Count: | 42 |
ICS Code (Chemical analysis): | 71.040.40 |
ICS Code (Chemical technology (Vocabularies)): | 01.040.71 |
scope:
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
Document History

18115-3
June 1, 2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general...