NEN-ISO 21360-6
Vacuum technology - Standard methods for measuring vacuum pump performance - Part 6: Cryogenic vacuum pumps
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 January 2024 |
| Status: | active |
| Page Count: | 24 |
| ICS Code (Vacuum technology): | 23.160 |
scope:
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
Document History
NEN-ISO 21360-6
January 1, 2024
Vacuum technology - Standard methods for measuring vacuum pump performance - Part 6: Cryogenic vacuum pumps
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum...