scope:

This Recommended Practice (RP) describes a test method appropriate for semiquantitative determination and qualitative characterization of organic compounds outgassed from materials or components exposed to air or gases in cleanrooms or other controlled environments. This RP specifies four outgassing temperatures-50 °C (122 °F), 75 °C (167 °F), 100 °C (212 °F), and 150 °C (302 °F)-to baseline cleanroom materials and components. The RP may become the basis of an agreement between customer and supplier in the specification, procurement, and certification of materials. This RP can also be applied for other materials where outgassing is a concern.