DIN EN ISO 14644-12
Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration (ISO/DIS 14644-12:2013); German version prEN ISO 14644-12:2013
inactive, Most Current
Organization: | DIN |
Publication Date: | 1 April 2013 |
Status: | inactive |
Page Count: | 26 |
ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
Document History
DIN EN ISO 14644-12
April 1, 2013
Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration (ISO/DIS 14644-12:2013); German version prEN ISO 14644-12:2013
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