DIN EN ISO 14644-15
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO/DIS 14644-15:2016); German and English version prEN ISO 14644-15:2016
inactive
| Organization: | DIN |
| Publication Date: | 1 May 2016 |
| Status: | inactive |
| Page Count: | 55 |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
Document History
March 1, 2018
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled...
DIN EN ISO 14644-15
May 1, 2016
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO/DIS 14644-15:2016); German and English version prEN ISO 14644-15:2016
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