AFNOR - NF EN 62047-26
Semiconductor devices - Micro-electromechanical devices - Part 26 : description and measurement methods for micro trench and needle structures
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 25 June 2016 |
| Status: | active |
| ICS Code (Semiconducting materials): | 29.045 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
NF EN 62047-26
June 25, 2016
Semiconductor devices - Micro-electromechanical devices - Part 26 : description and measurement methods for micro trench and needle structures
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