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BSI - BS EN ISO 14644-14

Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration

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Organization: BSI
Publication Date: 31 October 2016
Status: active
Page Count: 32
ICS Code (Cleanrooms and associated controlled environments): 13.040.35

Document History

BS EN ISO 14644-14
October 31, 2016
Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
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References

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