AFNOR - NF EN 62047-25
Semiconductor devices - Micro-electromechanical devices - Part 25 : silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 30 December 2016 |
| Status: | active |
| ICS Code (Semiconducting materials): | 29.045 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
NF EN 62047-25
December 30, 2016
Semiconductor devices - Micro-electromechanical devices - Part 25 : silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area
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