scope:

This part of ISO 14644 addresses the cleaning (removal of contaminants) to a specified degree on cleanroom surfaces, surfaces of equipment in the cleanroom and surfaces of materials in the cleanroom. The following are excluded from this document: • product and process cleaning; • cleaning of microbiological contamination; • detailed cleaning methods and procedures. This part of ISO 14644 provides guidance about different cleaning techniques, classified, e.g. as wet/dry and physical/chemical. This part of ISO 14644 provides guidance on which methods should be used for achieving required Surface cleanliness by particle concentration (SCP) and Surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels. The efficacy of cleaning techniques makes reference to the cleanliness classes and associated test methods found in ISO 14644-8, -9 and -10. The following matters of general guidance are provided: • assessment of adverse effects such as health and safety considerations, surface/material properties; • compatability of surfaces with the cleaning technique, • surface attributes such as morphology; • configurations such as crevices, holes and cracks, • waste and effluent • suitability of cleaning agents and materials (e.g. purity, cleanliness, properties)