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JSA - JIS C 5630-1

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

active, Most Current
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Organization: JSA
Publication Date: 21 March 2017
Status: active
ICS Code (Other semiconductor devices): 31.080.99

Document History

JIS C 5630-1
March 21, 2017
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
A description is not available for this item.
March 20, 2008
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
A description is not available for this item.
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