ISO FDIS 25178-607
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
|Publication Date:||19 November 2018|
|ICS Code (Properties of surfaces):||17.040.20|
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.