DS/EN ISO 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
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| Organization: | DS |
| Publication Date: | 16 October 2013 |
| Status: | active |
| Page Count: | 42 |
| ICS Code (Properties of surfaces): | 17.040.20 |
scope:
This part of ISO 25178 describes the metrological characteristics of phase shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Document History
DS/EN ISO 25178-603
October 16, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This part of ISO 25178 describes the metrological characteristics of phase shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Geometrical product specifications (GPS) – Surface texture: Areal – Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178‑603:2023)
This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted...
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO/DIS 25178-603:2011)
This part of ISO 25178 describes the metrological characteristics of phase shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO/FDIS 25178-603:2013)
This part of ISO 25178 describes the metrological characteristics of phase shifting interferometric (PSI) profile and areal surface texture measuring microscopes.