BSI - BS IEC 62047-30
Semiconductor devices - Micro-electromechanical devices Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
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| Organization: | BSI |
| Publication Date: | 31 October 2017 |
| Status: | active |
| Page Count: | 24 |
| ICS Code (Piezoelectric devices): | 31.140 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS IEC 62047-30
October 31, 2017
Semiconductor devices - Micro-electromechanical devices Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
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