TSE - TS EN 62047-3
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
active, Most Current
| Organization: | TSE |
| Publication Date: | 27 March 2007 |
| Status: | active |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
TS EN 62047-3
March 27, 2007
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
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