TSE - TS EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
active, Most Current
| Organization: | TSE |
| Publication Date: | 24 December 2014 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 specifies the determination of Poisson'sratio from the test results obtained by the application of uniaxialand biaxial loads to thin-film micro-electromechani
Document History
TS EN 62047-21
December 24, 2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
This part of IEC 62047 specifies the determination of Poisson'sratio from the test results obtained by the application of uniaxialand biaxial loads to thin-film micro-electromechanical systems(MEMS)...