TSE - TS EN 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
active, Most Current
| Organization: | TSE |
| Publication Date: | 13 January 2011 |
| Status: | active |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
TS EN 62047-4
January 13, 2011
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
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