TSE - TS EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
active
| Organization: | TSE |
| Publication Date: | 9 April 2009 |
| Status: | active |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Electronics (Vocabularies)): | 01.040.31 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
December 9, 2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
A description is not available for this item.
TS EN 62047-1
April 9, 2009
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
A description is not available for this item.