TSE - TS EN 62047-12
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
active, Most Current
| Organization: | TSE |
| Publication Date: | 8 March 2012 |
| Status: | active |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
TS EN 62047-12
March 8, 2012
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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