TSE - TS EN 62047-11
Semiconductor devices - Micro-electromechanical devices -- Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
active, Most Current
| Organization: | TSE |
| Publication Date: | 13 February 2014 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
TS EN 62047-11
February 13, 2014
Semiconductor devices - Micro-electromechanical devices -- Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
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