scope:

This part of IEC 62047 specifies descriptions of trenchstructure and needle structure in a micrometer scale. In addition,it provides examples of measurement for the geometry of bothstructures. For trench structures, this standard applies tostructures with a depth of 1 ?m to 100 ?m; walls and trenches withrespective widths of 5 ?m to 150 ?m; and aspect ratio of 0,006 7 to20. For needle structures, the standard applies to structures withthree or four faces with a height, horizontal width and verticalwidth of 2 ?m or larger, and with dimensions that fit inside a cubewith sides of 100 ?m. This standard is applicable to the structuraldesign of MEMS and geometrical evaluation after MEMS processes.