TSE - TS EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
active, Most Current
| Organization: | TSE |
| Publication Date: | 9 December 2016 |
| Status: | active |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
scope:
Bu standart, ISO 14644-1?de belirtildigi gibi havadakitaneciklerde
Document History
TS EN ISO 14644-14
December 9, 2016
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Bu standart, ISO 14644-1?de belirtildigi gibi havadakitaneciklerden arinik olmaya iliskin temiz odalar ve bagli kontrolluortamlarda donanimin (ornegin, makineler, olcum cihazlari, surecdonanimi,...