TSE - TS EN ISO 14644-9
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
active, Most Current
| Organization: | TSE |
| Publication Date: | 12 June 2013 |
| Status: | active |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
Document History
TS EN ISO 14644-9
June 12, 2013
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
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