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TSE - TS EN 62047-18

Semiconductor devices - Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials

active, Most Current
Organization: TSE
Publication Date: 13 February 2014
Status: active
ICS Code (Other semiconductor devices): 31.080.99

Document History

TS EN 62047-18
February 13, 2014
Semiconductor devices - Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials
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