SPIE - MEMS and MOEMS Technology and Applications
| Organization: | SPIE |
| Publication Date: | 1 January 2000 |
| Page Count: | 534 |
scope:
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechan
Author: Prosenjit Rai-Choudhury