NEN - NPR-ISO/TS 25138
Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 January 2011 |
| Status: | active |
| Page Count: | 44 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This Technical Specification describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films. This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
Document History
NPR-ISO/TS 25138
January 1, 2011
Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry
This Technical Specification describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films....