NEN-ISO 5302
Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 October 2003 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Vacuum technology): | 23.160 |
scope:
This International Standard specifies methods for the measurement of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps a) with mechanical or magnetic bearings, and b) with or without an additional drag stage.
Document History
NEN-ISO 5302
October 1, 2003
Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics
This International Standard specifies methods for the measurement of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps a) with...