NEN-EN-IEC 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 October 2014 |
| Status: | active |
| Page Count: | 39 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
NEN-EN-IEC 62047-21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechani
Document History
NEN-EN-IEC 62047-21
October 1, 2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
NEN-EN-IEC 62047-21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS)...