NEN - NPR-ISO/TR 19319
Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area, and sample area viewed by the analyser
active, Most Current
| Organization: | NEN |
| Publication Date: | 30 January 2004 |
| Status: | active |
| Page Count: | 26 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This Technical Report provides information for measuring the lateral resolution, the analysis area, and the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
Document History
NPR-ISO/TR 19319
January 30, 2004
Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area, and sample area viewed by the analyser
This Technical Report provides information for measuring the lateral resolution, the analysis area, and the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron...