NEN-EN-IEC 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 April 2016 |
| Status: | active |
| Page Count: | 75 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
NEN-EN-IEC 62047-1 defines terms for micro-electromechani
Document History
NEN-EN-IEC 62047-1
April 1, 2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
NEN-EN-IEC 62047-1 defines terms for micro-electromechanical devices including the process of production of such devices.
July 1, 2006
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.