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NEN - NPR-ISO/TS 24597

Microbeam analysis - Scanning electron microscopy - Methods of evaluating image sharpness

active, Most Current
Organization: NEN
Publication Date: 1 July 2011
Status: active
Page Count: 96
ICS Code (Optical equipment): 37.020
scope:

This Technical Specification specifies methods of evaluating the sharpness of digitized images generated by a scanning electron microscope (SEM) by means of a Fourier transform (FT) method, a contrast-to-gradient (CG) method and a derivative (DR) method.

Document History

NPR-ISO/TS 24597
July 1, 2011
Microbeam analysis - Scanning electron microscopy - Methods of evaluating image sharpness
This Technical Specification specifies methods of evaluating the sharpness of digitized images generated by a scanning electron microscope (SEM) by means of a Fourier transform (FT) method, a...
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