NEN-EN-IEC 62374
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 November 2007 |
| Status: | active |
| Page Count: | 50 |
| ICS Code (Semiconductor devices): | 31.080 |
scope:
This International Standard provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure.
Document History
NEN-EN-IEC 62374
November 1, 2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
This International Standard provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB...