NEN-EN-ISO 14644-8
Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination
| Organization: | NEN |
| Publication Date: | 1 May 2004 |
| Status: | inactive |
| Page Count: | 33 |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
scope:
This part of ISO 14644 covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated cont rolled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification . This part of ISO 14644 currently considers only concentrations of AMC between 100 and 10 12 g/m3 under cleanroom operation al conditions.
Document History