NEN - NPR-ISO/TR 15969
Surface chemical analysis - Depth profiling - Measurement of sputtered depth
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 July 2001 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
Gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered dept measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres.
Document History
NPR-ISO/TR 15969
July 1, 2001
Surface chemical analysis - Depth profiling - Measurement of sputtered depth
Gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered dept measurement described in this Technical Report are applicable to techniques of surface...