NEN-ISO 20341
Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
active, Most Current
| Organization: | NEN |
| Publication Date: | 1 August 2003 |
| Status: | active |
| Page Count: | 14 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This International Standard specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. This International Standard is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Document History
NEN-ISO 20341
August 1, 2003
Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
This International Standard specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in...