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NEN-EN-IEC 62047-4

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

active, Most Current
Organization: NEN
Publication Date: 1 November 2010
Status: active
Page Count: 30
ICS Code (Other semiconductor devices): 31.080.99
scope:

This part of IEC 62047 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. This part of IEC 62047 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.

Document History

NEN-EN-IEC 62047-4
November 1, 2010
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
This part of IEC 62047 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series...
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