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NEN-IEC 62047-30

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

active, Most Current
Organization: NEN
Publication Date: 1 October 2017
Status: active
Page Count: 28
ICS Code (Piezoelectric devices): 31.140
ICS Code (Other semiconductor devices): 31.080.99
scope:

NEN-IEC 62047-30 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

Document History

NEN-IEC 62047-30
October 1, 2017
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
NEN-IEC 62047-30 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to...
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