scope:

This International Standard specifies a method for evaluating the repeatability and constancy of the intensity scale of X-ray photoelectron spectrometers, for general analytical purposes, using unmonochromated Al or Mg X-rays or monochromated Al X-rays. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrument settings that may affect this constancy.